Manufacturing for the Thin Film and PVD Industry since 1987!!

Ion Source Parts

High Current – Model #10-18, 10-160
DescriptionEaton# (Old)SCM #
Source Filament17077602801
Filament Insulator (Ceramic)17086802802
Filament Mounting Screw12003202803
End Plate Shield17064402804
Rod12000802805
Filament Clamp17003102806
Front Slit Arc Chamber17174802807
Rear Plate Arc Chamber17050002808
Side Plate17049902809
End Plate17086702810
Corona Shield Sides171304028060
Curved Field Block170494028061
Beam Defining Aperture174013028062
Strike Plate174013028063
Strike Plate End Block174012028064
Post Analysis Aperture179670028065
Corona Shield171305028066
Ground Electrode171207028067
Faraday Flag Beam Stop174455028068
Accelerator Head Linear174107028069
Faraday Flag Electrode174033028070
Faraday Aperture Plate170852028071
Beam Line Linear Block173299028072
Faraday Flag Beam Aperture171795028080

Eaton Nova White Source

DescriptionEaton# (Old)SCM#
Face Plate17174803815
Side Plate17049903816
Filament Clamp17898003818
Retainer Pin Assembly120080/170364403819
Ceramic Filament Insulator17086803822
Arc Chamber Mounting Block17898703824
Arc Chamber Mounting Block17050303825
Gas Feed Tube17402903833
Ground Electrode Plate170379303834
20A Face Plate170488703817
Ceramic Filament Insulator1709830/170328303823
Beam Defining Plate174009028062
Beam Aperture171795028080
Repeller Retainer Insert17898403835
Repeller Shield17904203836
Corona Shield Source Plate1708368028066
Wave Guide Liner Block173299028072
Filament Strap17033170B3837
Filament Mounting Block Insulator170830203838
Heat Shield170329703839
Pigtail Filament17898503840
Filament Insulator Insert12003213841
End Plate17898103842
Filament Shield17898203843
Graphite Repellar Plate17898303844
Electron Shower Filament Insulator17183003845
Silver Feed Strap17898803846
Silver Strap17690303847
Flag Strike Plate17232503848
Graphite Strike Plate Liner170811703849