SCM manufactures and repairs complete Ion Implantor Sources compatible with Varian Extrion and Eaton Nova. We also rebuild Emitter Assemblies and Copper Hearths.
In addition, we manufacture multi-pocket and single pocket gun replacement parts compatible with Tesmescal (Edwards), Telemark, and CHA.
The ash content of our Graphite parts is less than five parts per million (<5ppm).
Many replacement parts are in stock for immediate shipment.
Refer to the links on the left for your E-Beam gun and Implantor Source needs.
Additional parts and services available upon request.
